Department of Engineering Physics

Department of Engineering Physics
Optical, Atomic / Molecular & Laser Physics

The Electronic Devices and Materials (Microelectronics) Laboratory contains an array of integrated circuit fabrication equipment and state-of-the-art diagnostic instrumentation. The fabrication facilities encompass complete photolithography, mask printing, thermal oxidation, dopant diffusion, and metalization capabilities. The diagnostic facilities include a sub-micron probe station and a scanning electron microscope.
 

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