This course is a graduate-level class on theoretical and physical principles involved in realizing devices from silicon and gallium arsenide. Implementation and fabrication of integrated circuits is stressed.
This course is a graduate-level class with a laboratory section on MEMS design. It covers the history, design, fabrication, and basic modeling of MEMS.
This course is a graduate-level class on theoretical and physical principles involved in realizing RF microsystems from semiconductor materials. Implementation and fabrication of integrated RF microsystems is stressed.
This course is a graduate-level class with a laboratory section on design and modeling of classical and advanced MEMS and RF/optical MEMS devices.